EFFECTS OF ISOLATED ATOMIC COLLISION CASCADES ON SIO2/SI INTERFACES STUDIED BY SCANNING TUNNELING MICROSCOPY

被引：110

作者：

WILSON, IH

ZHENG, NJ

KNIPPING, U

TSONG, IST

机构：

来源：

PHYSICAL REVIEW B | 1988年 / 38卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.38.8444

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：8444 / 8449

页数：6

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