PHOTON TUNNELING MICROSCOPY

被引:64
作者
GUERRA, JM
机构
[1] Polaroid Corporation, Optical Engineering Department, Cambridge, MA, 02139
来源
APPLIED OPTICS | 1990年 / 29卷 / 26期
关键词
Evanescent coupling; Optical proximity imaging; Optical stethoscope; Optical tunneling; Photon scanning tunneling microscope; Photon tunneling microscope; Scanning near field optical microscope; Scanning tunneling microscope; Total internal reflection;
D O I
10.1364/AO.29.003741
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Photons incident to a total internal reflection surface that is also the object plane of a reflected light microscope will tunnel through a submicron gap in the presence of a dielectric sample. Tunneling increases exponentially with sample height for a homogeneous refractive index and js quantified by empirical calibration to a known geometry. Video photometry of the grays scale tunneling image is converted by a three-axis oscilloscope into a real time 3-D topographic image featuring variable perspective. Vertical resolution is detector-limited to less than a nanometer over a field depth, also detector-limited, of ˜0.75λ; lateral resolution is enhanced to ˜0.29λ. Photon tunneling images of diamond turned surfaces, optical data structures, a polished optical surface, and microlithographic structures are among those presented. Comparison and correlation with other methods for measuring surface topography in this regime are briefly discussed. © 1990 Optical Society of America.
引用
收藏
页码:3741 / 3752
页数:12
相关论文
共 16 条