ESTIMATION OF THE IN-SITU PERMEABILITIES IN THIN-FILM INDUCTORS

被引：5

作者：

YAMAGUCHI, M ^{[1
]}

ARAKAWA, S ^{[1
]}

YABUKAMI, S ^{[1
]}

ARAI, KI ^{[1
]}

KUMAGAI, F ^{[1
]}

KIKUCHI, S ^{[1
]}

机构：

[1] TOHOKU GAKUIN UNIV,DEPT ELECT ENGN,TAGAJO 985,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期

关键词：

D O I：

10.1109/20.281139

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We investigated the in-situ average permeabilities of thin-film inductors regarding process damages, domain structure, local demagnetizing field and effective air gap in the inductor. It is estimated that the effective air gaps were most responsible for the values of the in-situ permeabilities of a meander-coil type thin-film inductor with dosed magnetic circuit.

引用

页码：3210 / 3212

页数：3

共 11 条

[1] APPLICATION OF YIG FILM TO THIN-FILM INDUCTORS [J].