AN IMPROVED TECHNIQUE OF IMPEDANCE MEASUREMENT FOR THIN-FILM INDUCTORS OVER 10MHZ

被引：9

作者：

ARAI, KI

YAMAGUCHI, M

OHZEKI, H

机构：

[1] Research Institute of Electrical Communication, Tohoku University, Aoba, Sendai, 980

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1992年 / 28卷 / 05期

关键词：

D O I：

10.1109/20.179434

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper discusses the accuracy of the impedance measurement for thin film inductors over 10MHz range. It is necessary for accurate measurement to prepare an appropriate fixture. A fixture having precise dimensions permits impedance matching between the inductor and the measurement instrument. We developed an improved system to measure the impedance of thin film inductors accurately up to 500MHz.

引用

收藏

页码：2175 / 2177

页数：3

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