LVV SPECTRA OF SI,SIO2 AND SI3N4

LVV Auger spectra of Si, SiO2and Si3N4are discussed in terms of features ofPES spectra and X-ray emission spectra of these materials. We show how the p-predominance in the valence bands contributes to the L2, 3VV spectra of the respective materials. We also show how departure from ideal stoichiometryin SiO2and Si3N4can be easily detected by the additional structure arising from free" silicon in evaporated silicon oxide and CVD-nitrides. © 1979 IOP Publishing Ltd."