PHASE SEPARATION IN SILICON OXIDES AS SEEN BY AUGER-ELECTRON SPECTROSCOPY

被引：59

作者：

JOHANNESSEN, JS

SPICER, WE

STRAUSSER, YE

机构：

[1] STANFORD UNIV,ELECTR LABS,STANFORD,CA 94305

[2] VARIAN ASSOC,PALO ALTO,CA 94306

来源：

关键词：

D O I：

10.1063/1.88523

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：452 / 454

页数：3

共 8 条

[1] STRUCTURE OF SILICON OXIDE FILMS [J].

COLEMAN, MV ;

THOMAS, DJD .

PHYSICA STATUS SOLIDI, 1967, 22 (02) :593-&

FLITSCH, R ;

RAIDER, SI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :305-308

[3]

HOLLINGER G, 1974, TETRAHEDRALLY BONDED, P102

[4]

Pauling L., 1960, NATURE CHEM BOND INT

[5]

Philipp H. R., 1972, J NONCRYST SOLIDS, V8, P627

[6]

STRAUSSER YE, 1975, 4 ARPANDS WORKSH

[7] ANALYSIS OF RADIAL-DISTRIBUTION FUNCTION OF SIOX [J].

TEMKIN, RJ .

WAGNER, CD .