MEASUREMENT OF THE BEAM ENERGY SPREAD FROM A MICROWAVE ION-SOURCE

被引：5

作者：

CHAMBERLIN, EP

LEUNG, KN

WALTHERS, S

BIBEAU, RA

STICE, RL

KELLEY, GM

WILSON, J

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 26卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(87)90755-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：227 / 234

页数：8

共 18 条

[1] ISOTOPE SEPARATORS WITH VARIABLE RESOLVING POWER [J].

BECKER, K ;

WOLLNIK, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 187 (01) :167-169

[2] ANOMALIES OF ENERGY OF POSITIVE IONS EXTRACTED FROM HIGH-FREQUENCY ION SOURCES . A THEORETICAL STUDY [J].

BENOITCATTIN, P ;

BERNARD, LC .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) :5723-+

[3]

Bevington P., 1969, DATA REDUCTION ERROR

[4] ION RESPONSE TO PLASMA EXCITATION-FREQUENCY [J].

BRUCE, RH .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) :7064-7066

[5] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J].

COBURN, JW ;

KAY, E .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :4965-4971

[6] RADIOFREQUENCY MODULATION IN THE THONEMAN ION SOURCE [J].

ERO, J .

NUCLEAR INSTRUMENTS & METHODS, 1958, 3 (05) :303-306

[7]

KOHLER K, 1985, J APPL PHYS, V57, P59, DOI 10.1063/1.335396

[8]

KOHLER K, 1985, J APPL PHYS, V58, P3350, DOI 10.1063/1.335797

[9]

KOMAROV VL, 1969, 1 C INT SOURC IONS S, P383

[10] A COMPACT MICROWAVE ION-SOURCE [J].

LEUNG, KN ;

WALTHER, S ;

OWREN, HW .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1985, 32 (05) :1803-1805

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