PREPARATION OF SUBSTITUTED Y3FE5O12 WAVE-GUIDE DIRECTIONAL COUPLER USING ION-BEAM ETCHING

被引：2

作者：

SUGIMOTO, N

KATOH, Y

TATE, A

SHIBUKAWA, A

机构：

[1] NTT, Opto-Electronics Laboratories, Ibaraki, 319-11, Tokai

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1993年 / 32卷 / 1A-B期

关键词：

GARNET; WAVE-GUIDE; DIRECTIONAL COUPLER; ION-BEAM ETCHING; YIG; GGG;

D O I：

10.1143/JJAP.32.L65

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The rib waveguide directional coupler of an epitaxially grown 4-mum-thick substituted Y3Fe5O12 (YIG) mono-layer film on a [111]-oriented Gd3Ga5O12 (GGG) substrate is prepared by argon ion-beam etching. A Ta/organic layer double-layer mask is utilized during ion-beam etching. The basic operation of the directional coupler at lambda = 1.55 mum is demonstrated.

引用

收藏

页码：L65 / L67

页数：3

相关论文

共 10 条

[1] WAVE-GUIDE MAGNETO-OPTIC ISOLATOR FABRICATED BY LASER ANNEALING [J].

ANDO, K ;

OKOSHI, T ;

KOSHIZUKA, N .

APPLIED PHYSICS LETTERS, 1988, 53 (01) :4-6

[2] DOUBLE-LAYERED MAGNETOOPTIC CHANNEL WAVE-GUIDE FOR WAVE-GUIDE ISOLATOR APPLICATION [J].

KAEWSURIYATHUMRONG, S ;

MIZUMOTO, T ;

MAK, HM ;

NAITO, Y .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1990, 8 (02) :177-182

[3] ION INCIDENT ANGLE DEPENDENCE OF RIDGE SHAPES FORMED ON [111] ORIENTED GD3GA5O12 BY ION-BEAM ETCHING [J].

KATOH, Y ;

SUGIMOTO, N ;

TATE, A ;

SHIBUKAWA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (5A) :L591-L593

[4] [110]-DIRECTED RIDGE FORMATION OF EPITAXIAL Y3FE5O12 FILM GROWN ON [111]-ORIENTED GD3GA5O12 [J].

KATOH, Y ;

SUGIMOTO, N ;

TATE, A ;

SHIBUKAWA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (5B) :L652-L654

[5] AR ION-BEAM ETCHING OF GADOLINIUM-GALLIUM GARNET [J].

KATOH, Y ;

SUGIMOTO, N ;

TATE, A ;

SHIBUKAWA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (01) :141-142

[6] VERIFICATION OF WAVE-GUIDE-TYPE OPTICAL CIRCULATOR OPERATION [J].

MIZUMOTO, T ;

CHIHARA, H ;

TOKUI, N ;

NAITO, Y .

ELECTRONICS LETTERS, 1990, 26 (03) :199-200

[7]

OKAMURA Y, 1989, SPIE, V1177, P354

[8] LIGHT GUIDANCE AND MODE CONVERSION IN MAGNETOOPTIC BURIED CHANNEL WAVE-GUIDES [J].

PROSS, E ;

DAMMANN, H ;

TOLKSDORF, W .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) :3849-3855

[9] INFLUENCE OF GROWTH TEMPERATURE ON THE MAGNETIC AND OPTICAL-PROPERTIES OF LIQUID-PHASE-EPITAXIAL(LPE)-GROWN LANTHANUM-SUBSTITUTED AND GALLIUM-SUBSTITUTED YTTRIUM-IRON-GARNET ((LA, GA)-YIG) FILMS AND THEIR APPLICATION TO WAVE-GUIDES [J].

SUGIMOTO, N ;

TATE, A ;

MINO, S ;

SHIBUKAWA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (5A) :1372-1377

[10] ETCH-TUNED RIDGED WAVE-GUIDE MAGNETOOPTIC ISOLATOR [J].

WOLFE, R ;

LIEBERMAN, RA ;

FRATELLO, VJ ;

SCOTTI, RE ;

KOPYLOV, N .

APPLIED PHYSICS LETTERS, 1990, 56 (05) :426-428