STUDY OF ALUMINUM-OXIDE FILMS BY ION-INDUCED X-RAYS AND RUTHERFORD BACKSCATTERING

被引：19

作者：

BAUER, W ^{[1
]}

MUSKET, RG ^{[1
]}

机构：

[1] SANDIA LABS,LIVERMORE,CA 94550

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 06期

关键词：

D O I：

10.1063/1.1662621

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2606 / 2609

页数：4

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