DETERMINATION OF FUNNEL LENGTH FROM CROSS-SECTION VERSUS LET MEASUREMENTS

被引：28

作者：

GOLKE, KW

机构：

[1] Honeywell SSEC MN14 - 2C15, Plymouth, MN, 55441

来源：

关键词：

Charge carriers - Electric charge - Mathematical models - Substrates - Surface phenomena;

D O I：

10.1109/23.273464

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method is proposed for determining the funnel length from heavy ion upset cross section versus LET data for bulk technologies having an epi layer.

引用

页码：1910 / 1917

页数：8

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[4]

PETERSEN EL, 1993, JUL NSREC