DETERMINATION OF TRACE IMPURITIES IN ORGANOMETALLIC SEMICONDUCTOR-GRADE REAGENTS AND PROCESS CHEMICALS WITH ELECTROTHERMAL VAPORIZATION INDUCTIVELY-COUPLED PLASMA-ATOMIC EMISSION-SPECTROMETRY

被引:7
作者
ARGENTINE, MD
KRUSHEVSKA, A
BARNES, RM
机构
关键词
ORGANOMETALLIC COMPOUND ANALYSIS; TRIMETHYLINDIUM AND TRIMETHYLALUMINUM; DIRECT VAPOR; DECOMPOSITION; ELECTROTHERMAL VAPORIZATION INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROMETRY;
D O I
10.1039/ja9940901121
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Both volatile and non-volatile impurities in semiconductor-grade organometallic reagents are determined by electrothermal vaporization-inductively coupled plasma atomic emission spectrometry (ETV-ICP-AES). Solid or liquid materials are dispensed directly onto a graphite microboat, and application of an appropriate time-temperature programme separates impurities based on their volatility. Calibration methods for volatile impurities (e.g., Si, Sn, Zn in trimethylaluminium) including external calibration, exponential dilution, and direct vapour sampling provide semi-quantitative results. Determination of non-volatile impurities by ETV-ICP-AES can be reasonably performed with aqueous external standard calibration.
引用
收藏
页码:1121 / 1128
页数:8
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