OPTICAL-PROPERTIES OF REACTIVELY SPUTTERED A-SIHX FILMS

被引：27

作者：

DENEUFVILLE, JP ^{[1
]}

MOUSTAKAS, TD ^{[1
]}

RUPPERT, AF ^{[1
]}

LANFORD, WA ^{[1
]}

机构：

[1] YALE UNIV,NEW HAVEN,CT 06520

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1980年 / 35-6卷 / JAN-期

关键词：

D O I：

10.1016/0022-3093(80)90641-9

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：481 / 486

页数：6

共 15 条

[1] IMPORTANCE OF ARGON PRESSURE IN THE PREPARATION OF RF-SPUTTERED AMORPHOUS SILICON-HYDROGEN ALLOYS [J].

ANDERSON, DA ;

MODDEL, G ;

PAESLER, MA ;

PAUL, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (03) :906-912

[2]

BAGLEY BG, 1977, B AM PHYS SOC, V22, P1241

[3]

BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[4] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON [J].

BRODSKY, MH ;

FRISCH, MA ;

ZIEGLER, JF ;

LANFORD, WA .

APPLIED PHYSICS LETTERS, 1977, 30 (11) :561-563

[5]

Carlson D. E., 1976, Twelfth IEEE Photovoltaic Specialists Conference 1976, P893

[6]

DENEUFVILLE JP, 1979, B AM PHYS SOC, V24, P400

[7] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1978, 18 (08) :4288-4300

[8]

Heavens O.S, 1955, OPTICAL PROPERTIES T

[9] OPTICAL-PROPERTIES AND STRUCTURE OF AMORPHOUS SILICON FILMS PREPARED BY CVD [J].

JANAI, M ;

ALLRED, DD ;

BOOTH, DC ;

SERAPHIN, BO .

SOLAR ENERGY MATERIALS, 1979, 1 (1-2) :11-27

[10] DEFECTS IN PLASMA-DEPOSITED A-SI-H [J].

KNIGHTS, JC ;

LUCOVSKY, G ;

NEMANICH, RJ .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1979, 32 (1-3) :393-403

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