FABRICATION OF LARGE-CORE, HIGH-DELTA OPTICAL WAVE-GUIDES IN POLYMERS

被引:39
作者
KAGAMI, M
ITO, H
ICHIKAWA, T
KATO, S
MATSUDA, M
TAKAHASHI, N
机构
[1] Applied Optics Laboratory, Toyota Central Research, Development Laboratories Inc., Nagakute, Aichigun, Aichi, 480-11
来源
APPLIED OPTICS | 1995年 / 34卷 / 06期
关键词
POLY(METHYL METHACRYLATE); WAVE-GUIDE; SIDEWALL FLATTENING;
D O I
10.1364/AO.34.001041
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The realization of polymer optical waveguides that have a large core size and high refractive-index difference (LCHD) Delta transmission characteristics is presented. A fabrication procedure for the waveguide based on vertical dip coating and reactive ion etching has been studied. To achieve the lower propagation loss, this procedure includes two original techniques, i.e., the lamination of thick polymer films and sidewall flattening. With these techniques, Delta of 5.4% and a 80 mu m x 83 mu m core polymer waveguide with 1.4-dB/cm propagation loss were achieved at 680 nm. The LCHD polymer waveguides are useful for practical power-transmission devices.
引用
收藏
页码:1041 / 1046
页数:6
相关论文
共 13 条
  • [1] EXTREMELY LOW-LOSS 4 X 4 GAAS/ALGAAS OPTICAL MATRIX SWITCH
    HAMAMOTO, K
    SUGOU, S
    KOMATSU, K
    KITAMURA, M
    [J]. ELECTRONICS LETTERS, 1993, 29 (17) : 1580 - 1582
  • [2] STANDARDIZATION AND CONTROL OF A DIP-COATING PROCEDURE FOR OPTICAL THIN-FILMS PREPARED FROM SOLUTION
    HEWAK, DW
    LIT, JWY
    [J]. CANADIAN JOURNAL OF PHYSICS, 1988, 66 (10) : 861 - 867
  • [3] POLYMER CHANNEL WAVE-GUIDES WITH LOW-LOSS AT 1.3 MU-M
    IMAMURA, S
    YOSHIMURA, R
    IZAWA, T
    [J]. ELECTRONICS LETTERS, 1991, 27 (15) : 1342 - 1343
  • [4] KAGAMI M, 1994, M DIGEST FRONTIERS I, P260
  • [5] LEE DL, 1986, ELECTROMAGNETIC PRIN, P174
  • [6] Mizoguchi H., 1992, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots(Cat. No.92CH3093-2), P31, DOI 10.1109/MEMSYS.1992.187686
  • [7] FABRICATION OF LOW-LOSS POLYMER WAVE-GUIDES USING INJECTION-MOLDING TECHNOLOGY
    NEYER, A
    KNOCHE, T
    MULLER, L
    [J]. ELECTRONICS LETTERS, 1993, 29 (04) : 399 - 401
  • [8] POLYIMIDE OPTICAL WAVE-GUIDES FABRICATED WITH ELECTRON-BEAM LITHOGRAPHY
    ROOKS, MJ
    ROUSSELL, HV
    JOHNSON, LM
    [J]. APPLIED OPTICS, 1990, 29 (27): : 3880 - 3882
  • [9] SULLIVAN CT, 1988, P SOC PHOTOOPT INSTR, V994, P92
  • [10] Suzuki S., 1994, Transactions of the Institute of Electronics, Information and Communication Engineers C-I, VJ77C-I, P184