STRUCTURE AND CARRIER LIFETIME IN LT-GAAS

被引:57
作者
LILIENTALWEBER, Z
CHENG, HJ
GUPTA, S
WHITAKER, J
NICHOLS, K
SMITH, FW
机构
[1] UNIV MICHIGAN,CTR ULTRAFAST OPT SCI,ANN ARBOR,MI 48109
[2] MIT,LINCOLN LAB,LEXINGTON,MA 02173
关键词
CARRIER LIFETIME; LOW-TEMPERATURE-GROWN GAAS; MBE; TEM;
D O I
10.1007/BF02650000
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The relationship between the structural quality of low-temperature GaAs layers and the photoexcited carrier lifetime has been studied. Transmission electron microscopy, x-ray rocking curves, time-resolved reflectance methods, and photoconductive-switch-response measurements were used for this study. For a variety of samples grown at temperatures in the vicinity of 200 degrees C, subpicosecond carrier lifetimes were observed both in as-grown layers, as well as in the same layers after post-annealing and formation of As precipitates. These results suggest that the carrier lifetime, which was found to be shorter in the as-grown layers than in the annealed ones, might be related to the density of As-Ga antisite defects present in the layers. The annealed layers which contained structural defects before annealing appeared to exhibit the longest carrier lifetime due to gettering of As on these defects (and formation of relatively large As precipitates) and depletion of extra As (As-GA) defects from the layer. It was found as well that the responsivity of detectors fabricated on these layers depended strongly on the structural quality of the layers, with the greatest response obtained not for the layers with the fewest defects, but for the layers with 10(7)-10(8)/cm(2) of pyramidal defects.
引用
收藏
页码:1465 / 1469
页数:5
相关论文
共 14 条
  • [1] PROCESSING AND CHARACTERIZATION OF GAAS GROWN INTO RECESSED SILICON
    ADKISSON, JW
    KAMINS, TI
    KOCH, SM
    HARRIS, JS
    ROSNER, SJ
    REID, GA
    NAUKA, K
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (02): : 717 - 719
  • [2] CLAVERIE A, 1991, PHILOS MAG A, V65, P981
  • [3] STOICHIOMETRY-RELATED DEFECTS IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY AT LOW-TEMPERATURES
    KAMINSKA, M
    WEBER, ER
    LILIENTALWEBER, Z
    LEON, R
    REK, ZU
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04): : 710 - 713
  • [4] MICROSTRUCTURE OF ANNEALED LOW-TEMPERATURE-GROWN GAAS-LAYERS
    LILIENTALWEBER, Z
    CLAVERIE, A
    WASHBURN, J
    SMITH, F
    CALAWA, R
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1991, 53 (02): : 141 - 146
  • [5] LILIENTALWEBER Z, 1992, MATER RES SOC SYMP P, V241, P101
  • [6] LILIENTALWEBER Z, 1990, MATER RES SOC SYMP P, V198, P371, DOI 10.1557/PROC-198-371
  • [7] LILIENTALWEBER Z, 1993, SEMI-INSULATING III-V MATERIALS, IXTAPA, MEXICO 1992, P135
  • [8] CHARACTERIZATION OF GAAS/SI/GAAS HETEROINTERFACES
    LILIENTALWEBER, Z
    MARIELLA, RP
    [J]. CHEMISTRY AND DEFECTS IN SEMICONDUCTOR HETEROSTRUCTURES, 1989, 148 : 241 - 246
  • [9] LILIENTALWEBER Z, 1991, APPL PHYS LETT, V58, P2143
  • [10] FORMATION OF ARSENIC PRECIPITATES IN GAAS BUFFER LAYERS GROWN BY MOLECULAR-BEAM EPITAXY AT LOW SUBSTRATE TEMPERATURES
    MELLOCH, MR
    OTSUKA, N
    WOODALL, JM
    WARREN, AC
    FREEOUF, JL
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (15) : 1531 - 1533