QUANTITATIVE DEPTH ANALYSIS OF IMPURITIES IN SOLIDS BASED ON COMBINATION OF AES AND EPMA

Quantitative depth Auger analysis of impurities in solids is based on relative sensitivity factors alpha-i(m) which are necessary for evaluation of impurity concentration in a depth Z as a function of the ratio li(m)(Z) of impurity Auger intensity to that of a matrix element. Determination of alpha-i(m) from the dose of an ion-implanted impurity does not ensure high accuracy due to possible systematic errors of dose measurement. This paper presents an alternative approach to evaluation of alpha-i(m), combining Auger profiles li(m)(Z) and electron probe X-ray microanalysis data for P and Sb in silica. The weight fraction of an impurity as a function of depth is expressed through alpha-i(m) and li(m)(Z) and then is introduced into a formula relating the intensity of characteristic X-rays of impurity atoms, to their depth profile. The values of alpha-i(m) is evaluated using the X-ray intensity of the impurity in a specimen as analysed relative to a standard (GaP, InP or GaSb, InSb).