A CHEMICAL AND STRUCTURAL INVESTIGATION OF SCHOTTKY AND OHMIC AU/GAAS CONTACTS

被引：15

作者：

COULMAN, D

NEWMAN, N

REID, GA

LILIENTALWEBER, Z

WEBER, ER

SPICER, WE

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,DEPT MAT SCI,BERKELEY,CA 94720

[3] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574595

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1521 / 1525

页数：5

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