FACETED DEFECTS IN GAAS EPITAXIAL LAYERS

被引:6
作者
SHAW, DW
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关键词
D O I
10.1016/0022-0248(72)90010-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:249 / &
相关论文
共 6 条
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[2]   ELECTRON MICROSCOPE CHARACTERIZATION OF DEFECTS ON GASEOUS-ETCHED SILICON SURFACES [J].
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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (07) :1171-&
[3]   ROOM TEMPERATURE CHEMICAL POLISHING OF GE AND GAAS [J].
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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (12) :1425-1428
[5]  
SHAW DW, 1969, 1968 S P I PHYS PHYS, P50
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WILLIAMS FV, 1964, J ELECTROCHEM SOC, V111, P887