INFLUENCE OF HYDROGEN PARTIAL-PRESSURE ON DEPOSITION AND PROPERTIES OF SPUTTERED AMORPHOUS GALLIUM-ARSENIDE

被引:14
作者
ALIMOUSSA, L [1 ]
CARCHANO, H [1 ]
THOMAS, JP [1 ]
机构
[1] UNIV LYON I,INST PHYS NUCL,F-69622 VILLEURBANNE,FRANCE
来源
JOURNAL DE PHYSIQUE | 1981年 / 42卷 / NC4期
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D O I
10.1051/jphyscol:19814151
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学科分类号
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页码:683 / 686
页数:4
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