VERSATILE COMPUTER-PROGRAMS FOR ANALYSIS OF RANDOM AND CHANNELING BACKSCATTERING SPECTRA

被引：42

作者：

KIDO, Y

KAWAMOTO, J

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 03期

关键词：

D O I：

10.1063/1.338148

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：956 / 961

页数：6

共 12 条

[1]

Andersen H. H., 1977, HYDROGEN STOPPING PO

[2] On the decrease of velocity of swiftly moving electrified particles in passing through matter [J].

Bohr, N. .

PHILOSOPHICAL MAGAZINE, 1915, 30 (175-80) :581-612

[3] CALCULATION OF ENERGY STRAGGLING FOR PROTONS AND HELIUM IONS [J].

CHU, WK .

PHYSICAL REVIEW A, 1976, 13 (06) :2057-2060

[4] ANALYTIC SOLUTION TO ELASTIC BACKSCATTERING [J].

CHU, WK ;

ZIEGLER, JF .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) :2768-2770

[5] DEPTH PROFILES OF LATTICE DISORDER RESULTING FORM ION BOMBARDMENT OF SILICON SINGLE CRYSTALS [J].

FELDMAN, LC ;

RODGERS, JW .

JOURNAL OF APPLIED PHYSICS, 1970, 41 (09) :3776-&

[6]

GIBBONS JF, 1975, PROJECTED RANGE STAT

[7] ANALYSIS OF ION-IMPLANTED SURFACE AND INTERFACE STRUCTURES BY COMPUTER-SIMULATED BACKSCATTERING SPECTRA [J].

KIDO, Y ;

KAKENO, M ;

YAMADA, K ;

KAWAMOTO, J ;

OHSAWA, H ;

KAWAKAMI, T .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (08) :3044-3051

[8] PROJECTED RANGE AND DAMAGE DISTRIBUTIONS IN ION-IMPLANTED AL, SI, AL2O3, AND GAAS [J].

KIDO, Y ;

KAWAMOTO, J .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) :3377-3387

[9]

Lindhard J., 1963, MAT FYS MEDD DAN VID, V33, P1, DOI DOI 10.1002/ADMA.200904153

[10]

Picraux S. T., 1982, Metastable Materials Formation by Ion Implantation. Proceedings of the Materials Research Society Annual Meeting, P71

← 1 2 →