EFFECTS OF SUBSTRATE TEMPERATURE, PRESSURE, AND HIGH EVAPORATION RATES ON NUCLEATION, EPITAXY, AND STRUCTURE OF PALLADIUM THIN FILMS

被引:15
作者
MURR, LE
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D O I
10.1016/0040-6090(71)90029-0
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T [工业技术];
学科分类号
08 ;
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页码:101 / &
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共 13 条
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