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ELLIPSOMETRIC MEASUREMENT OF CONTAMINATION IN AN OIL PUMPED UHV SYSTEM

被引：4
作者：
ROLLASON, RM
FANE, RW
NEAL, WEJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 02期
关键词：
D O I：
10.1116/1.1317711
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1019 / &
相关论文
共 5 条
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[2]   DETECTION OF OIL OR MERCURY ON SURFACES IN VACUUM SYSTEMS USING AN ELLIPSOMETER [J].
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[3]  
FANE RW, 1968, 4 INT VAC C P LONDON, pP510
[4]   MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].
MCCRACKIN, FL ;
PASSAGLIA, E ;
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STEINBERG, HL .
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[5]   CORRELATION OF STRUCTURAL WITH OPTICAL MEASUREMENTS ON THIN ALUMINIUM FILMS EVAPORATED IN ULTRA HIGH VACUUM [J].
NEAL, WEJ ;
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GRIMES, NW .
PHILOSOPHICAL MAGAZINE, 1970, 21 (169) :167-&
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