UPDATED SYSTEM MODEL FOR X-RAY-LITHOGRAPHY

被引:32
作者
KHAN, M
MOHAMMAD, L
XIAO, J
OCOLA, L
CERRINA, F
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词
D O I
10.1116/1.587577
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:3930 / 3935
页数:6
相关论文
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