NEUTRAL GAS-FLOW VELOCITY PROFILES IN THE JET PLASMA-CHEMICAL REACTOR

被引：5

作者：

BARDOS, L ^{[1
]}

STEPANEK, I ^{[1
]}

KARWASZ, G ^{[1
]}

机构：

[1] POLISH ACAD SCI, INST FLUID DYNAM, PL-80952 GDANSK, POLAND

来源：

VACUUM | 1990年 / 40卷 / 05期

关键词：

D O I：

10.1016/0042-207X(90)90243-R

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Radial and axial velocity profiles in the nitrogen flowing from the simple low pressure cylindrical jet were measured by the small size Prandtl probe. Guassian shapes of the radial velocity profiles were found. Supersonic values of the gas velocity up to M = 2 were measured at the jet axis, even at several centimeters from the nozzle mouth. Comparisons of the velocity profiles with corresponding profiles of the film thickness created after Jet PCVD process in the same reactor are discussed. © 1990.

引用

页码：449 / 452

页数：4