MECHANICAL-PROPERTIES OF RF MAGNETRON SPUTTERED W-C FILMS ON STAINLESS-STEEL

被引：18

作者：

SRIVASTAVA, PK ^{[1
]}

VANKAR, VD ^{[1
]}

CHOPRA, KL ^{[1
]}

机构：

[1] INDIAN INST TECHNOL, CTR MAT SCI & TECHNOL, NEW DELHI 110016, INDIA

来源：

关键词：

D O I：

10.1016/0040-6090(88)90241-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 116

页数：10

共 19 条

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