SEMICONDUCTOR SENSORS .2. PIEZORESISTIVE DEVICES

被引：9

作者：

TARONI, A

PRUDENZIATI, M

ZANARINI, G

机构：

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS AND CONTROL INSTRUMENTATION | 1970年 / IE17卷 / 06期

关键词：

D O I：

10.1109/TIECI.1970.230445

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：415 / +

页数：1

共 27 条

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[3]

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[4]

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[5]

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[7]

LONG D, 1968, ENERGY BANDS SEMICON

[8] USE OF PIEZORESISTIVE MATERIALS IN THE MEASUREMENT OF DISPLACEMENT, FORCE, AND TORQUE [J].

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[9]

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[10] TECHNIQUE FOR OHMIC CONNECTING LEADS TO SILICON [J].

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MAISUI, K ;

HASIGUTI, RR .

JOURNAL OF APPLIED PHYSICS, 1962, 33 (04) :1610-&

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