X-RAY LITHOGRAPHY BY SYNCHROTRON RADIATION OF INS-ES

被引：16

作者：

ARITOME, H

NISHIMURA, T

KOTANI, H

MATSUI, S

NAKAGAWA, O

NAMBA, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期

关键词：

D O I：

10.1116/1.569693

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：992 / 994

页数：3

共 7 条

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[2] REPLICATION OF 0.1-MUM GEOMETRIES WITH X-RAY LITHOGRAPHY
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SPILLER, E
TOPALIAN, J
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1332 - 1335
[3] NAKAYAMA T, 1976, 7TH S ION IMPL SUBM, P51
[4] OSHIO T, 1968, J JPN SOC APPL PHYS, V46, P43
[5] X-RAY LITHOGRAPHY - COMPLEMENTARY TECHNIQUE TO ELECTRON-BEAM LITHOGRAPHY
SMITH, HI
SPEARS, DL
BERNACKI, SE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 913 - 917
[6] APPLICATION OF SYNCHROTRON RADIATION TO X-RAY LITHOGRAPHY
SPILLER, E
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FEDER, R
GROBMAN, WD
GUDAT, W
TOPALIAN, J
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5450 - 5459
[7] SPILLER E, 1976, SCIENCE, P191