INFLUENCE OF BACKSCATTERED ELECTRONS ON LATERAL RESOLUTION IN SCANNING AUGER MICROSCOPY

被引：28

作者：

KIRSCHNER, J ^{[1
]}

机构：

[1] KFA JULICH GMBH,INST GRENZFLACHENFORSCH & VAKUUMPHYS,D-5170 JULICH 1,FED REP GER

来源：

APPLIED PHYSICS | 1977年 / 14卷 / 04期

关键词：

D O I：

10.1007/BF00883438

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：351 / 354

页数：4

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