ANALYSIS OF THE EXCITON LUMINESCENCE OF SILICON FOR CHARACTERIZATION OF THE CONTENT OF IMPURITIES

被引:55
作者
NAKAYAMA, H
NISHINO, T
HAMAKAWA, Y
机构
[1] Osaka University, Toyonaka, Osaka, 560, Japan
关键词
D O I
10.1143/JJAP.19.501
中图分类号
O59 [应用物理学];
学科分类号
摘要
24
引用
收藏
页码:501 / 511
页数:11
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