PRESSURE CONSIDERATIONS ASSOCIATED WITH ION SAMPLING FROM GLOW DISCHARGES

被引：46

作者：

COBURN, JW

KAY, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.1315386

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：738 / &

共 11 条

[1] ION SAMPLING CONSIDERATIONS FOR A DISCHARGE PLASMA OF NITROGEN
BOHME, DK
GOODINGS, JM
[J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (11) : 4261 - &
[2] BROWN SC, 1959, BASIC DATA PLASMA PH, P33
[3] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE
COBURN, JW
KAY, E
[J]. APPLIED PHYSICS LETTERS, 1971, 18 (10) : 435 - &
[4] A SYSTEM FOR DETERMINING MASS ENERGY OF PARTICLES INCIDENT ON A SUBSTRATE IN A PLANAR DIODE SPUTTERING SYSTEM
COBURN, JW
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1970, 41 (08) : 1219 - &
[5] DRAWIN HW, 1966, PLASMA DIAGNOSTICS, P777
[6] MASS SPECTROMETRIC STUDIES OF MOLECULAR IONS IN THE NOBLE GASES
HORNBECK, JA
MOLNAR, JP
[J]. PHYSICAL REVIEW, 1951, 84 (04): : 621 - 625
[7] ELECTRON REMOVAL IN HELIUM AFTERGLOWS
JOHNSON, RA
MCCLURE, BT
HOLT, RB
[J]. PHYSICAL REVIEW, 1950, 80 (03): : 376 - 379
[8] KENNARD EH, 1938, KINETIC THEORY GASES, P64
[9] MASSENSPEKTROMETRISCHE UNTERSUCHUNGEN AN DER POSITIVEN SAULE IN AR, AR-HE- UND AR-H2-GEMISCHEN
PAHL, M
[J]. ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE, 1963, A 18 (12): : 1276 - +
[10] ANGULAR DISTRIBUTION OF FLOW FROM ORIFICES AND TUBES AT HIGH KNUDSEN NUMBERS
STICKNEY, RE
KEATING, RF
YAMAMOTO, S
HASTINGS, WJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (01): : 10 - &