DEBRIS-FREE SINGLE-LINE LASER-PLASMA X-RAY SOURCE FOR MICROSCOPY

被引：63

作者：

RYMELL, L ^{[1
]}

BERGLUND, M ^{[1
]}

HERTZ, HM ^{[1
]}

机构：

[1] LUND INST TECHNOL,DEPT PHYS,S-22100 LUND,SWEDEN

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 20期

关键词：

D O I：

10.1063/1.113105

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A debris-free, narrow-bandwidth, single-line laser-plasma soft x-ray source has been developed suitable for water-window microscopy using zone-plate optics. The 10 Hz table-top source utilizes microscopic ammonium hydroxide droplets as target. The N VI emission at λ=2.88 nm is ∼1×1012 photons/(sr pulse). As an alternative to ammonium hydroxide, it is demonstrated that urea dissolved in water also produces strong emission from nitrogen ions, thereby extending the applicability of the droplet x-ray source to a new range of target materials.© 1995 American Institute of Physics.

引用

页码：2625 / 2627

页数：3

共 19 条

[11]

MICHETTE AG, 1992, XRAY MICROSCOPY, V3

[12]

MICHETTE AG, 1993, REV SCI INSTRUM, V64, P1476

[13]

NEFF W, 1994, SPIE, V2015, P32

[14]

NIEMANN B, 1990, OPTIK, V84, P35

[15] DROPLET TARGET FOR LOW-DEBRIS LASER-PLASMA SOFT-X-RAY GENERATION [J].

RYMELL, L ;

HERTZ, HM .

OPTICS COMMUNICATIONS, 1993, 103 (1-2) :105-110

[16]

RYMELL L, UNPUB

[17]

SCHNEIDER G, 1994, XRAY SCI, V2, P8

[18] LASER-PRODUCED PLASMAS FOR SOFT-X-RAY PROJECTION LITHOGRAPHY [J].

SILFVAST, WT ;

RICHARDSON, MC ;

BENDER, H ;

HANZO, A ;

YANOVSKY, V ;

JIN, F ;

THORPE, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :3126-3133

[19] COMPACT SCANNING SOFT-X-RAY MICROSCOPE USING A LASER-PRODUCED PLASMA SOURCE AND NORMAL-INCIDENCE MULTILAYER MIRRORS [J].

TRAIL, JA ;

BYER, RL .

OPTICS LETTERS, 1989, 14 (11) :539-541

← 1 2 →