SHEET RESISTIVITY AND TRANSMISSION ELECTRON-MICROSCOPE INVESTIGATIONS OF BF2+-IMPLANTED SILICON

[1] BEANLAND DG, 1977, ION IMPLANTATION SEM, P31

[2] BOOKER GR, 1969, PHILOS MAG, V11, P1303

[3] Chadderton L. T., 1971, Radiation Effects, V7, P129, DOI 10.1080/00337577108232573

[4] CHEN LJ, 1979, 37TH P ANN M EL MICR, P694

[5] CHEN LJ, 1980, 38TH P ANN M EL MICR, P324

[6] ELECTRON-MICROSCOPE STUDY OF STACKING-FAULT FORMATION IN BORON IMPLANTED SILICON [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2): : 57 - 61

[7] DEARNALEY G., 1973, ION IMPLANTATION

[8] STACKING-FAULTS IN (100) EPITAXIAL SILICON CAUSED BY HF AND THERMAL OXIDATION AND EFFECTS ON P-N-JUNCTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (11) : 4465 - &

[9] STRUCTURE OF ROD DEFECTS IN BORON-IMPLANTED SILICON [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1978, 37 (04): : 441 - 446

[10] LIMA CAF, 1976, PHILOS MAG, V34, P1057

[1] BEANLAND DG, 1977, ION IMPLANTATION SEM, P31

[2] BOOKER GR, 1969, PHILOS MAG, V11, P1303

[3] Chadderton L. T., 1971, Radiation Effects, V7, P129, DOI 10.1080/00337577108232573

[4] CHEN LJ, 1979, 37TH P ANN M EL MICR, P694

[5] CHEN LJ, 1980, 38TH P ANN M EL MICR, P324

[6] ELECTRON-MICROSCOPE STUDY OF STACKING-FAULT FORMATION IN BORON IMPLANTED SILICON [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2): : 57 - 61

[7] DEARNALEY G., 1973, ION IMPLANTATION

[8] STACKING-FAULTS IN (100) EPITAXIAL SILICON CAUSED BY HF AND THERMAL OXIDATION AND EFFECTS ON P-N-JUNCTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (11) : 4465 - &

[9] STRUCTURE OF ROD DEFECTS IN BORON-IMPLANTED SILICON [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1978, 37 (04): : 441 - 446

[10] LIMA CAF, 1976, PHILOS MAG, V34, P1057