TWO-DIMENSIONAL MODELING OF ION-IMPLANTATION WITH SPATIAL MOMENTS

被引：24

作者：

HOBLER, G

LANGER, E

SELBERHERR, S

机构：

来源：

SOLID-STATE ELECTRONICS | 1987年 / 30卷 / 04期

关键词：

D O I：

10.1016/0038-1101(87)90175-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：445 / 455

页数：11

相关论文

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