A THEORETICAL-STUDY OF THE CRITICAL RADIUS OF PRECIPITATES AND ITS APPLICATION TO SILICON-OXIDE IN SILICON

被引：141

作者：

VANHELLEMONT, J

CLAEYS, C

机构：

来源：

关键词：

D O I：

10.1063/1.339194

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3960 / 3967

页数：8

共 25 条

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