EFFECTS OF LASER IRRADIATION ON THE SURFACE-STRUCTURE OF VIRGIN AND IMPLANTED (110) CRUCIBLE GROWN SILICON

被引:1
作者
BHATTACHARYA, PK [1 ]
机构
[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1980年 / 59卷 / 02期
关键词
D O I
10.1002/pssa.2210590250
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:827 / 833
页数:7
相关论文
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