STATIC RESPONSE OF MINIATURE CAPACITIVE PRESSURE SENSORS WITH SQUARE OR RECTANGULAR SILICON DIAPHRAGM

被引：30

作者：

BLASQUEZ, G

NACIRI, Y

BLONDEL, P

BENMOUSSA, N

PONS, P

机构：

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1987年 / 22卷 / 07期

关键词：

D O I：

10.1051/rphysap:01987002207050500

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：505 / 510

页数：6

共 9 条

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