学术探索
学术期刊
新闻热点
数据分析
智能评审
立即登录
CORRELATION BETWEEN ION-FLUX AND MICROSTRUCTURE OF A-C-H FILMS
被引:34
作者
:
EHRHARDT, H
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
EHRHARDT, H
KLEBER, R
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
KLEBER, R
KRUGER, A
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
KRUGER, A
DWORSCHAK, W
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
DWORSCHAK, W
JUNG, K
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
JUNG, K
MUHLING, I
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
MUHLING, I
ENGELKE, F
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
ENGELKE, F
METZ, H
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
METZ, H
机构
:
[1]
UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
[2]
TECH UNIV CHEMNITZ, SEKT PHYS, O-9010 KARL MARX STADT, GERMANY
[3]
KARL MARX UNIV LEIPZIG, O-7010 LEIPZIG, GERMANY
来源
:
DIAMOND AND RELATED MATERIALS
|
1992年
/ 1卷
/ 2-4期
关键词
:
D O I
:
10.1016/0925-9635(92)90048-S
中图分类号
:
T [工业技术];
学科分类号
:
08 ;
摘要
:
a-C:H layers prepared at different ion energies have been characterised by several methods such as 13C-NMR, EELS and ESR. With increasing ion energies from 30 eV to 170 eV, the sp2 fraction of the samples rises from 27% to about 60% and the spin density increases by more than one order of magnitude due to less incorporation of hydrogen into the film. Simulaneously, the linewidth of the ESR signal becomes narrower. This can be interpreted as an increasing cluster size from single benzene rings to 3 or 4 fused 6-fold rings. Measurements of the ion energy distribution (IED) of the positive ion flux to the substrate surface indicate a saddle-shaped peak structure typical of a resistive plasma sheath. Mass spectra of the ion flux can be correlated, to a certain degree, to the appearance potentials of electron-molecule and ion-molecule collisions. © 1992.
引用
收藏
页码:316 / 320
页数:5
相关论文
共 19 条
[1]
Angus J.C., 1986, PLASMA DEPOSITED THI, P89
[2]
ION-MOLECULE REACTIONS OF 1,3-BUTADIENE, OF ACETYLENE AND OF ACETYLENE-METHANE MIXTURES
BARKER, R
论文数:
0
引用数:
0
h-index:
0
BARKER, R
HAMILL, WH
论文数:
0
引用数:
0
h-index:
0
HAMILL, WH
WILLIAMS, RR
论文数:
0
引用数:
0
h-index:
0
WILLIAMS, RR
[J].
JOURNAL OF PHYSICAL CHEMISTRY,
1959,
63
(06)
: 825
-
828
[3]
ANOMALIES OF ENERGY OF POSITIVE IONS EXTRACTED FROM HIGH-FREQUENCY ION SOURCES . A THEORETICAL STUDY
BENOITCATTIN, P
论文数:
0
引用数:
0
h-index:
0
BENOITCATTIN, P
BERNARD, LC
论文数:
0
引用数:
0
h-index:
0
BERNARD, LC
[J].
JOURNAL OF APPLIED PHYSICS,
1968,
39
(12)
: 5723
-
+
[4]
EELS ANALYSIS OF VACUUM ARC-DEPOSITED DIAMOND-LIKE FILMS
BERGER, SD
论文数:
0
引用数:
0
h-index:
0
机构:
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
BERGER, SD
MCKENZIE, DR
论文数:
0
引用数:
0
h-index:
0
机构:
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
MCKENZIE, DR
MARTIN, PJ
论文数:
0
引用数:
0
h-index:
0
机构:
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
MARTIN, PJ
[J].
PHILOSOPHICAL MAGAZINE LETTERS,
1988,
57
(06)
: 285
-
290
[5]
RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BRANDT, G
论文数:
0
引用数:
0
h-index:
0
BRANDT, G
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(08)
: 4590
-
4595
[6]
ELECTRICAL CHARACTERISTICS AND GROWTH-KINETICS IN DISCHARGES USED FOR PLASMA DEPOSITION OF AMORPHOUS-CARBON
CATHERINE, Y
论文数:
0
引用数:
0
h-index:
0
CATHERINE, Y
COUDERC, P
论文数:
0
引用数:
0
h-index:
0
COUDERC, P
[J].
THIN SOLID FILMS,
1986,
144
(02)
: 265
-
280
[7]
POLYMER-LIKE AND HARD AMORPHOUS HYDROGENATED CARBON-FILMS PREPARED IN AN INDUCTIVELY COUPLED R.F. GLOW-DISCHARGE
DWORSCHAK, W
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
DWORSCHAK, W
KLEBER, R
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
KLEBER, R
FUCHS, A
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
FUCHS, A
SCHEPPAT, B
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
SCHEPPAT, B
KELLER, G
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
KELLER, G
JUNG, K
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
JUNG, K
EHRHARDT, H
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
EHRHARDT, H
[J].
THIN SOLID FILMS,
1990,
189
(02)
: 257
-
267
[8]
FIELD FH, 1970, ELECTRON IMPACT PHEN
[9]
INHOMOGENEOUS CARBON BONDING IN HYDROGENATED AMORPHOUS-CARBON FILMS
GRILL, A
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
GRILL, A
MEYERSON, BS
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
MEYERSON, BS
PATEL, VV
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
PATEL, VV
REIMER, JA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
REIMER, JA
PETRICH, MA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
PETRICH, MA
[J].
JOURNAL OF APPLIED PHYSICS,
1987,
61
(08)
: 2874
-
2877
[10]
ISAI HC, 1987, J VAC SCI TECHNOL A, V5, P3287
←
1
2
→
共 19 条
[1]
Angus J.C., 1986, PLASMA DEPOSITED THI, P89
[2]
ION-MOLECULE REACTIONS OF 1,3-BUTADIENE, OF ACETYLENE AND OF ACETYLENE-METHANE MIXTURES
BARKER, R
论文数:
0
引用数:
0
h-index:
0
BARKER, R
HAMILL, WH
论文数:
0
引用数:
0
h-index:
0
HAMILL, WH
WILLIAMS, RR
论文数:
0
引用数:
0
h-index:
0
WILLIAMS, RR
[J].
JOURNAL OF PHYSICAL CHEMISTRY,
1959,
63
(06)
: 825
-
828
[3]
ANOMALIES OF ENERGY OF POSITIVE IONS EXTRACTED FROM HIGH-FREQUENCY ION SOURCES . A THEORETICAL STUDY
BENOITCATTIN, P
论文数:
0
引用数:
0
h-index:
0
BENOITCATTIN, P
BERNARD, LC
论文数:
0
引用数:
0
h-index:
0
BERNARD, LC
[J].
JOURNAL OF APPLIED PHYSICS,
1968,
39
(12)
: 5723
-
+
[4]
EELS ANALYSIS OF VACUUM ARC-DEPOSITED DIAMOND-LIKE FILMS
BERGER, SD
论文数:
0
引用数:
0
h-index:
0
机构:
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
BERGER, SD
MCKENZIE, DR
论文数:
0
引用数:
0
h-index:
0
机构:
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
MCKENZIE, DR
MARTIN, PJ
论文数:
0
引用数:
0
h-index:
0
机构:
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
CSIRO,DIV APPL PHYS,LINDFIELD,NSW 2070,AUSTRALIA
MARTIN, PJ
[J].
PHILOSOPHICAL MAGAZINE LETTERS,
1988,
57
(06)
: 285
-
290
[5]
RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BRANDT, G
论文数:
0
引用数:
0
h-index:
0
BRANDT, G
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(08)
: 4590
-
4595
[6]
ELECTRICAL CHARACTERISTICS AND GROWTH-KINETICS IN DISCHARGES USED FOR PLASMA DEPOSITION OF AMORPHOUS-CARBON
CATHERINE, Y
论文数:
0
引用数:
0
h-index:
0
CATHERINE, Y
COUDERC, P
论文数:
0
引用数:
0
h-index:
0
COUDERC, P
[J].
THIN SOLID FILMS,
1986,
144
(02)
: 265
-
280
[7]
POLYMER-LIKE AND HARD AMORPHOUS HYDROGENATED CARBON-FILMS PREPARED IN AN INDUCTIVELY COUPLED R.F. GLOW-DISCHARGE
DWORSCHAK, W
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
DWORSCHAK, W
KLEBER, R
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
KLEBER, R
FUCHS, A
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
FUCHS, A
SCHEPPAT, B
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
SCHEPPAT, B
KELLER, G
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
KELLER, G
JUNG, K
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
JUNG, K
EHRHARDT, H
论文数:
0
引用数:
0
h-index:
0
机构:
Fachbereich Physik, Universität Kaiserslautern
EHRHARDT, H
[J].
THIN SOLID FILMS,
1990,
189
(02)
: 257
-
267
[8]
FIELD FH, 1970, ELECTRON IMPACT PHEN
[9]
INHOMOGENEOUS CARBON BONDING IN HYDROGENATED AMORPHOUS-CARBON FILMS
GRILL, A
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
GRILL, A
MEYERSON, BS
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
MEYERSON, BS
PATEL, VV
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
PATEL, VV
REIMER, JA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
REIMER, JA
PETRICH, MA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
PETRICH, MA
[J].
JOURNAL OF APPLIED PHYSICS,
1987,
61
(08)
: 2874
-
2877
[10]
ISAI HC, 1987, J VAC SCI TECHNOL A, V5, P3287
←
1
2
→