CORRELATION BETWEEN ION-FLUX AND MICROSTRUCTURE OF A-C-H FILMS

被引:34
作者
EHRHARDT, H
KLEBER, R
KRUGER, A
DWORSCHAK, W
JUNG, K
MUHLING, I
ENGELKE, F
METZ, H
机构
[1] UNIV KAISERSLAUTERN, FACHBEREICH PHYS, W-6750 KAISERSLAUTERN, GERMANY
[2] TECH UNIV CHEMNITZ, SEKT PHYS, O-9010 KARL MARX STADT, GERMANY
[3] KARL MARX UNIV LEIPZIG, O-7010 LEIPZIG, GERMANY
关键词
D O I
10.1016/0925-9635(92)90048-S
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
a-C:H layers prepared at different ion energies have been characterised by several methods such as 13C-NMR, EELS and ESR. With increasing ion energies from 30 eV to 170 eV, the sp2 fraction of the samples rises from 27% to about 60% and the spin density increases by more than one order of magnitude due to less incorporation of hydrogen into the film. Simulaneously, the linewidth of the ESR signal becomes narrower. This can be interpreted as an increasing cluster size from single benzene rings to 3 or 4 fused 6-fold rings. Measurements of the ion energy distribution (IED) of the positive ion flux to the substrate surface indicate a saddle-shaped peak structure typical of a resistive plasma sheath. Mass spectra of the ion flux can be correlated, to a certain degree, to the appearance potentials of electron-molecule and ion-molecule collisions. © 1992.
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页码:316 / 320
页数:5
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