DEFORMATION IN DIELECTRIC-ISOLATED SUBSTRATES AND ITS CONTROL BY A MULTILAYER POLYSILICON SUPPORT STRUCTURE

被引：14

作者：

SUZUKI, T

MIMURA, A

KAMEI, T

OGAWA, T

机构：

来源：

关键词：

D O I：

10.1149/1.2129945

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1537 / 1542

页数：6

共 10 条

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Mimura, Akio
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (11) : 1776 - 1780
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