AN AES STUDY OF DAMAGE INDUCED BY INERT-GAS IONS AT SIO2 SURFACES - INFLUENCE OF ION MASS AND ENERGY

被引：4

作者：

KHELLAFI, M ^{[1
]}

LANG, B ^{[1
]}

机构：

[1] UNIV STRASBOURG 1,EHICS,INST PHYS & CHIM MAT,SURFACES INTERFACES GRP,CNRS,F-67070 STRASBOURG,FRANCE

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1990年 / 25卷 / 04期

关键词：

D O I：

10.1051/rphysap:01990002504038900

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：389 / 394

页数：6

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