LASER-INDUCED MODIFICATIONS IN A-C-H THIN-FILMS

被引:10
作者
SPOUSTA, J
PERRIERE, J
LAURENT, A
FOGARASSY, E
PREVOT, B
DEUNAMUNO, S
机构
[1] UNIV PARIS 06,F-75251 PARIS 05,FRANCE
[2] LAB PHASE,CRN,F-67037 STRASBOURG,FRANCE
关键词
D O I
10.1016/0169-4332(93)90511-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have studied the transformations of amorphous hydrogenated carbon films (a-C: H) induced by pulsed laser irradiations. By the complementary use of isotopic (hydrogen/deuterium) tracing experiments and nuclear microanalysis, the changes induced by the laser treatments in the elemental composition of the films were evidenced. The loss of deuterium atoms was accompanied by a graphitization of the films. In addition, even at laser intensities much lower than the ablation threshold, a large exchange phenomenon was evidenced between the deuterium atoms initially incorporated in the amorphous carbon layers, and hydrogen atoms coming from the ambient water vapour. These findings are certainly related to the thermal effects induced in the a-C:H films by the laser pulses.
引用
收藏
页码:242 / 248
页数:7
相关论文
共 11 条
[1]   ION-BEAM-INDUCED HYDROGEN RELEASE FROM A-C-H - A BULK MOLECULAR RECOMBINATION MODEL [J].
ADEL, ME ;
AMIR, O ;
KALISH, R ;
FELDMAN, LC .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (07) :3248-3251
[2]   USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].
DILLON, RO ;
WOOLLAM, JA ;
KATKANANT, V .
PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489
[3]   ONE-STEP GROWTH OF POLYCRYSTALLINE SILICON THIN-FILMS AT LOW-TEMPERATURE BY ARF EXCIMER LASER-INDUCED PHOTO-CVD [J].
ELLIQ, M ;
FOGARASSY, E ;
FUCHS, C ;
STOQUERT, JP ;
DEUNAMUNO, S ;
PREVOT, B ;
MATHE, EL .
APPLIED SURFACE SCIENCE, 1992, 54 :35-40
[4]   INFLUENCE OF THE SUBSTRATE ON THE TEMPERATURE INDUCED BY PULSED LASER IRRADIATION OF THIN-FILMS [J].
JADIN, A ;
FILIOUGUINE, IV ;
WAUTELET, M ;
LAUDE, LD .
APPLIED SURFACE SCIENCE, 1990, 46 (1-4) :375-377
[5]   STUDY OF THE GROWTH MECHANISMS OF AMORPHOUS-CARBON FILMS BY ISOTOPIC TRACING METHODS [J].
PERRIERE, J ;
LAURENT, A ;
ENARD, JP .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 11 (1-4) :347-351
[6]  
PERRIERE J, 1984, MATER RES SOC S P, V38, P443
[7]   PULSED LASER TREATMENT OF DIAMOND-LIKE CARBON-FILMS [J].
PRAWER, S ;
KALISH, R ;
ADEL, M .
APPLIED PHYSICS LETTERS, 1986, 48 (23) :1585-1587
[8]  
ROBERTSON J, 1986, ADV PHYS, V35, P317, DOI 10.1080/00018738600101911
[9]   SIMULATION AND EVALUATION OF NUCLEAR-REACTION SPECTRA [J].
VIZKELETHY, G .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4) :1-5
[10]   DIAMOND-LIKE 3-FOLD COORDINATED AMORPHOUS-CARBON [J].
WADA, N ;
GACZI, PJ ;
SOLIN, SA .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :543-548