EFFECT OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING

[1] DEPTH RESOLUTION OF SPUTTER PROFILING [J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140

[2] [Anonymous], 1963, KGL DANSKE VIDENSKAB

[3] BRIGGS D, 1983, PRACTICAL SURFACE AN

[4] FROM CASCADE TO SPIKE - A FRACTAL-GEOMETRY APPROACH [J]. PHYSICAL REVIEW LETTERS, 1987, 58 (20) : 2083 - 2086

[5] INFLUENCE OF CHEMICAL DRIVING FORCES IN ION MIXING OF METALLIC BILAYERS [J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 185 - 187

[6] CHENG YT, IN PRESS MATERIALS M

[7] CHENG YT, 1987, MATER RES SOC S P, V74, P419

[8] CIRLIN EH, IN PRESS J VAC SCI T

[9] Feldman LC, 1986, FUNDAMENTALS SURFACE

[10] Hofmann S, 1983, PRACTICAL SURFACE AN, P141

[1] DEPTH RESOLUTION OF SPUTTER PROFILING [J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140

[2] [Anonymous], 1963, KGL DANSKE VIDENSKAB

[3] BRIGGS D, 1983, PRACTICAL SURFACE AN

[4] FROM CASCADE TO SPIKE - A FRACTAL-GEOMETRY APPROACH [J]. PHYSICAL REVIEW LETTERS, 1987, 58 (20) : 2083 - 2086

[5] INFLUENCE OF CHEMICAL DRIVING FORCES IN ION MIXING OF METALLIC BILAYERS [J]. APPLIED PHYSICS LETTERS, 1984, 45 (02) : 185 - 187

[6] CHENG YT, IN PRESS MATERIALS M

[7] CHENG YT, 1987, MATER RES SOC S P, V74, P419

[8] CIRLIN EH, IN PRESS J VAC SCI T

[9] Feldman LC, 1986, FUNDAMENTALS SURFACE

[10] Hofmann S, 1983, PRACTICAL SURFACE AN, P141