EFFECT OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING

[21] HARTREE-SLATER SUBSHELL PHOTOIONIZATION CROSS-SECTIONS AT 1254 AND 1487EV [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (02) : 129 - 137

[22] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY [J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) : 33 - 37

[23] THEORETICAL ASPECTS OF ATOMIC MIXING BY ION-BEAMS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 25 - 41

[24] SIMKO SJ, COMMUNICATION

[25] VANROSSUM M, 1988, ION IMPLANTATION 198, P1

[26] WINTERBON K, 1970, KGL DANSKE VIDENSKAB, V37, P1

[27] EFFECT OF THERMODYNAMICS ON ION MIXING [J]. APPLIED PHYSICS LETTERS, 1987, 50 (21) : 1485 - 1487

[21] HARTREE-SLATER SUBSHELL PHOTOIONIZATION CROSS-SECTIONS AT 1254 AND 1487EV [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (02) : 129 - 137

[22] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY [J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (01) : 33 - 37

[23] THEORETICAL ASPECTS OF ATOMIC MIXING BY ION-BEAMS [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 25 - 41

[24] SIMKO SJ, COMMUNICATION

[25] VANROSSUM M, 1988, ION IMPLANTATION 198, P1

[26] WINTERBON K, 1970, KGL DANSKE VIDENSKAB, V37, P1

[27] EFFECT OF THERMODYNAMICS ON ION MIXING [J]. APPLIED PHYSICS LETTERS, 1987, 50 (21) : 1485 - 1487