THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY

被引：109

作者：

SEAH, MP

HUNT, CP

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1983年 / 5卷 / 01期

关键词：

D O I：

10.1002/sia.740050108

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：33 / 37

页数：5

共 42 条

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