THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN COMPOSITION DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY

被引：109

作者：

SEAH, MP

HUNT, CP

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1983年 / 5卷 / 01期

关键词：

D O I：

10.1002/sia.740050108

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：33 / 37

页数：5

共 42 条

[21] SPUTTERING OF AMORPHOUS SILICON FILMS BY 0.5 TO 5-KEV AR+ IONS [J].

KIRSCHNER, J ;

ETZKORN, HW .

APPLIED SURFACE SCIENCE, 1979, 3 (02) :251-271

[22] INFLUENCE OF ATOMIC MIXING AND PREFERENTIAL SPUTTERING ON DEPTH PROFILES AND INTERFACES [J].

LIAU, ZL ;

TSAUR, BY ;

MAYER, JW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :121-127

[23] RECOIL MIXING IN SOLIDS BY ENERGETIC ION-BEAMS [J].

LITTMARK, U ;

HOFER, WO .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :329-342

[24] DEPTH PROFILING BY SIMS DEPTH RESOLUTION, DYNAMIC-RANGE AND SENSITIVITY [J].

MAGEE, CW ;

HONIG, RE .

SURFACE AND INTERFACE ANALYSIS, 1982, 4 (02) :35-41

[25]

Makh S. S., 1980, Surface and Interface Analysis, V2, P115, DOI 10.1002/sia.740020307

[26] DEPTH RESOLUTION FACTOR OF A STATIC GAUSSIAN ION-BEAM [J].

MALHERBE, JB ;

SANZ, JM ;

HOFMANN, S .

SURFACE AND INTERFACE ANALYSIS, 1981, 3 (06) :235-239

[27] INFLUENCE OF ION-BOMBARDMENT ON DEPTH RESOLUTION IN AUGER-ELECTRON SPECTROSCOPY ANALYSIS OF THIN GOLD-FILMS ON NICKEL [J].

MATHIEU, HJ ;

MCCLURE, DE ;

LANDOLT, D .

THIN SOLID FILMS, 1976, 38 (03) :281-294

[28] SPUTTERING - REVIEW OF SOME RECENT EXPERIMENTAL AND THEORETICAL ASPECTS [J].

OECHSNER, H .

APPLIED PHYSICS, 1975, 8 (03) :185-198

[29] ENERGY-DISTRIBUTIONS OF ATOMS SPUTTERED FROM ALKALI-HALIDES BY 540 EV ELECTRONS [J].

OVEREIJNDER, H ;

SZYMONSKI, M ;

HARING, A ;

DEVRIES, AE .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2) :63-71

[30] ELECTRON-BEAM DAMAGE IN AUGER-ELECTRON SPECTROSCOPY [J].

PANTANO, CG ;

MADEY, TE .

APPLIED SURFACE SCIENCE, 1981, 7 (1-2) :115-141

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