MEASUREMENT OF THE NEUTRAL PARTICLE DENSITY IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA BY RAYLEIGH-SCATTERING

被引：13

作者：

CRONRATH, W

TANAKA, H

BOWDEN, MD

UCHINO, K

MURAOKA, K

机构：

[1] Department of Energy Conversion, Kyushu University, Kasuga, Fukuoka

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1995年 / 34卷 / 10B期

关键词：

NEUTRAL PARTICLE DENSITY; ELECTRON CYCLOTRON RESONANCE PLASMA; RAYLEIGH SCATTERING; THOMSON SCATTERING; ARGON; METASTABLE ATOMS;

D O I：

10.1143/JJAP.34.L1402

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The neutral atom density in an electron cyclotron resonance plasma has been directly measured for the first time using a combination of Rayleigh and Thomson scattering. The measurements were made in the source region of a 3 mTorr argon discharge, and indicated that the neutral atom density was at least 50% less than would be expected at a gas pressure of 3 mTorr. The decrease in the neutral atom density is attributed to the effect of ion-neutral charge exchange collisions in the plasma. The accuracy of the measurement was found to depend on the contribution of metastable atoms to the measured scattered signal.

引用

页码：L1402 / L1404

页数：3

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