HYBRID INTEGRATION OF LASER DIODE AND MONOMODE HIGH CONTRAST SLAB WAVE-GUIDE ON SILICON

被引:10
作者
JOPPE, JL [1 ]
DEKRIJGER, AJT [1 ]
NOORDMAN, OFJ [1 ]
机构
[1] UNIV TWENTE,DEPT PHYS ENGN,7500 AE ENSCHEDE,NETHERLANDS
关键词
LASERS; DIODES; SLAB WAVE-GUIDES; INTEGRATED OPTICS;
D O I
10.1049/el:19910104
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The hybrid integration of an AlGaAs laser diode and a monomode high contrast optical slab waveguide on silicon is reported. The laser was placed upside down in an anisotropically etched well and mounted by thermocompression. The power coupled into the waveguide was 1 mW and a coupling efficiency of more than 5% has been achieved.
引用
收藏
页码:162 / 163
页数:2
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