LOW-TEMPERATURE ION-BEAM MIXING OF BILAYERS AND MULTILAYERS IN THE TI-CU SYSTEM

被引：11

作者：

BORGESEN, P ^{[1
]}

ALFORD, TL ^{[1
]}

LILIENFELD, DA ^{[1
]}

JOHNSON, HH ^{[1
]}

机构：

[1] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1990年 / 50卷 / 02期

关键词：

81.20;

D O I：

10.1007/BF00343412

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The mixing rate for Ti-Cu bilayers irradiated by 600 keV Xe ions near liquidnitrogen temperature was found to be a factor of 1.6 smaller than estimated on the basis of a cylindrical thermal spike model. At room temperature radiation enhanced diffusion contributes measurably to the mixing. As was found previously for Fe-Ti and Ni-Ti samples, mixing was found to be considerably faster at the Cu-Ti interfaces of a multilayer sample. © 1990 Springer-Verlag.

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页码：161 / 164

页数：4

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