ION-BEAM MIXING OF ALUMINUM AND TITANIUM

被引：17

作者：

BORGESEN, P ^{[1
]}

LILIENFIELD, DA ^{[1
]}

JOHNSON, HH ^{[1
]}

机构：

[1] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

来源：

关键词：

D O I：

10.1063/1.343567

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：513 / 519

页数：7

共 44 条

[1] DEPTH RESOLUTION OF SPUTTER PROFILING
ANDERSEN, HH
[J]. APPLIED PHYSICS, 1979, 18 (02): : 131 - 140
[2] FUNDAMENTAL-ASPECTS OF ION-BEAM MIXING
AVERBACK, RS
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) : 675 - 687
[3] ION-BEAM MIXING IN PURE AND IN IMMISCIBLE COPPER BILAYER SYSTEMS
AVERBACK, RS
PEAK, D
THOMPSON, LJ
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 39 (01): : 59 - 64
[4] ION-BEAM MIXING AT NICKEL-SILICON INTERFACES
AVERBACK, RS
THOMPSON, LJ
MOYLE, J
SCHALIT, M
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) : 1342 - 1349
[5] ION MIXING IN AL,SI, AND THEIR OXIDES
BARCZ, AJ
NICOLET, MA
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 33 (03): : 167 - 173
[6] STRAGGLING IN ENERGY-LOSS OF ENERGETIC HYDROGEN AND HELIUM-IONS
BESENBACHER, F
ANDERSEN, JU
BONDERUP, E
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3): : 1 - 15
[7] SHORT-RANGE AND LONG-RANGE ION-BEAM MIXING IN CU-AL - INFLUENCE OF INTERFACIAL OXIDE
BESENBACHER, F
BOTTIGER, J
NIELSEN, SK
WHITLOW, HJ
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (03): : 141 - 145
[8] Bohr N., 1948, K DAN VIDENSK SELSK, V18, P1
[9] BORGESEN P, 1989, MATER RES SOC P, V128
[10] BORGESEN P, IN PRESS J MATER RES