ION MIXING IN AL,SI, AND THEIR OXIDES

被引：35

作者：

BARCZ, AJ ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 33卷 / 03期

关键词：

D O I：

10.1007/BF00618750

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：167 / 173

页数：7

共 39 条

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[9] ION-BEAM MIXING IN SILICON AND GERMANIUM AT LOW-TEMPERATURES [J].

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[10] BOMBARDMENT-DIFFUSED COATINGS AND ION-BEAM MIXING [J].

DEARNALEY, G .

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