Effects of UV-Irradiation on the Formation of Oxide Thin Films from Chemically Modified Metal-Alkoxides

被引：129

作者：

Tohge, N. ^{[1
]}

Shinmou, K. ^{[2
]}

Minami, T. ^{[2
]}

机构：

[1] Kinki Univ, Dept Met Engn, Higashiosaka, Osaka 577, Japan

[2] Univ Osaka Prefecture, Dept Appl Mat Sci, Sakai, Osaka 593, Japan

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 1994年 / 2卷 / 1-3期

关键词：

film TiO2-ZrO2; patterning; UV irradiation;

D O I：

10.1007/BF00486313

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The effects of UV-irradiation on the properties of ZrO2 and TiO2 gel films prepared from corresponding metal-butoxides modified with acetylacetone (AcAc) or benzoylacetone (BzAc) have been studied. It was found that the chelate bonds of beta-diketones remaining in the gel films were dissociated by the UV-irradiation. The UVirradiation also changed the properties of the gel films such as solubility; the solubility in acidic solutions was decreased for ZrO2 gel films modified with AcAc and TiO2 gel films modified with BzAc became insoluble in alcohol. Based on these findings, a new fine-patterning process has been established, which enables us to make fine-patterns of ZrO2 and TiO2 films on a variety of substrates.

引用

页码：581 / 585

页数：5

共 10 条

[1] ELECTRONIC ABSORPTION SPECTRA OF ACETYL-ACETONATO COMPLEXES .1. COMPLEXES WITH TRIVALENT TRANSITION METAL IONS [J].

BARNUM, DW .

JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1961, 21 (3-4) :221-237

[2] FINE PATTERNING OF THIN SOL-GEL FILMS [J].

KRUG, H ;

MERL, N ;

SCHMIDT, H .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1992, 147 :447-450

[3]

MATSUDA A, 1990, P SOC PHOTO-OPT INS, V1328, P62, DOI 10.1117/12.22546

[4] SYNTHESIS AND PROPERTIES OF TANTALUM OXIDE-FILMS PREPARED BY THE SOL-GEL METHOD USING PHOTOIRRADIATION [J].

OHISHI, T ;

MAEKAWA, S ;

KATOH, A .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1992, 147 :493-498

[5]

Roncone R.L., 1991, J NONCRYST SOLIDS

[6] PREPARATION OF PBZRO3-PBTIO3 FERROELECTRIC THIN-FILMS BY THE SOL-GEL PROCESS [J].

TOHGE, N ;

TAKAHASHI, S ;

MINAMI, T .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (01) :67-71

[7] FINE-PATTERNING ON GLASS SUBSTRATES BY THE SOL-GEL METHOD [J].

TOHGE, N ;

MATSUDA, A ;

MINAMI, T ;

MATSUNO, Y ;

KATAYAMA, S ;

IKEDA, Y .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 100 (1-3) :501-505

[8] FORMATION AND PROPERTIES OF FERROELECTRIC BI4TI3O12 FILMS BY THE SOL-GEL PROCESS [J].

TOHGE, N ;

FUKUDA, Y ;

MINAMI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12A) :4016-4017

[9] PREPARATION OF HIGH-TC SUPERCONDUCTING OXIDE-FILMS IN THE BI-(PB)-CA-SR-CU-O SYSTEM FROM STABILIZED METAL-ALKOXIDES [J].

TOHGE, N ;

TATSUMISAGO, M ;

MINAMI, T .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 121 (1-3) :443-447

[10]

TOHGE N, 1991, P INT C SCI TECH NEW, P239

← 1 →