EFFECT OF PROCESS PARAMETERS ON STRESS DEVELOPMENT IN TWO-DIMENSIONAL OXIDATION

被引：34

作者：

HU, SM

机构：

来源：

关键词：

D O I：

10.1063/1.341430

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：323 / 330

页数：8

共 55 条

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